Entegris, Inc. announced Monday it donated $20,000 to the University’s Department of Mechanical Engineering to further research on particle metrology.
Entegris, a materials integrity management company, gave the donation to enable the University to develop measurement methods for determining particle levels on plastic components. Entegris manufactures products such as wafer carriers, pods and shipping devices that could use this research.
Kirk Mikkelsen, manager of Entegris’ product test laboratory, said the company recognizes the value of such research, particularly as the demand for it increases.
“Historically, our particle technology laboratory in the mechanical engineering department has been very successful in conducting vital, fundamental research to further the technology and methodologies that will benefit industry,” said University Prof. Benjamin Y. A. Liu, an expert on particles and measurement techniques.

— Compiled from staff and wire reports.
Erin Ghere welcomes comments at [email protected].